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Image: Photon Energy vs Resolution

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Photon_Energy_vs_Resolution.PNG(441 × 377 pixels, file size: 7 KB, MIME type: image/png)

Description: This plot shows the photon energy used in lithography vs. the node or resolution requirement. The photon energy increases as the wavelength is reduced, but absorption limits imposed by air have made light sources for wavelengths shorter than 193 nm difficult to work with.
Title: Photon Energy vs Resolution
Credit: Transferred from en.wikipedia to Commons.
Author: Guiding light at English Wikipedia
Usage Terms: Creative Commons Attribution-Share Alike 3.0
License: CC BY-SA 3.0
License Link: http://creativecommons.org/licenses/by-sa/3.0
Attribution Required?: Yes

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