Image: Diffraction order spectrum with range of illumination
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Description: The spectrum of diffraction orders for a line-space pattern (pitch just under 3 wavelength/NA) is shown with the range of illumination angles also indicated by the color range. References: B. Smith, Proc. SPIE 3334, 142 (1998); N. Zeggaoui et al., Proc. SPIE 7823, 78233Y (2010).
Title: Diffraction order spectrum with range of illumination
Credit: Power Point
Author: Guiding light
Usage Terms: Creative Commons Attribution-Share Alike 4.0
License: CC BY-SA 4.0
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