Image: DUV vs EUV line edge variability
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Description: Left: Multiple scans of the intensity profile of a 40 nm wide line imaged by DUV (ArF 193 nm wavelength) overlay on one another nearly completely. Right: Multiple scans of the intensity profile of a 20 nm wide line imaged by EUV (13.5 nm wavelength) show edge position variability of about 1-2 (5-10% of feature width) nm per side.[1]
Title: DUV vs EUV line edge variability
Credit: Own work
Author: Guiding light
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License: CC BY-SA 4.0
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